@inproceedings{2acdbfe2aefd4edb9be8fc79aa139f4f,
title = "200nm-pitched, Superconducting Nb Interconnects for Cryo-CMOS Application",
abstract = "A 200nm-pitched, superconducting niobium (Nb) interconnects with TiN protecting layer are fabricated on a 300-mm wafer for cryo-CMOS used in Quantum State Controller (QSC) application. The developed Nb interconnects show superior superconductivity with a Tc of 7.8 K and a record-high Jc of 64MA/cm2 at 4.2 K, which is high enough to local interconnects used in a cryo-CMOS circuit. For the first time, the SPICE simulation, using a 65nm-node cryogenic (4K) PDK with a technology file including Nb superconducting interconnects, estimates 40\% improvement in signal delay in a typical use case. This result indicates that the power consumption in cryogenic CMOS operation can be reduced by the superconducting interconnects, as the operating voltage can be lowered while maintaining the same operational speed as that with the Cu interconnects.",
keywords = "BEOL, Nb, Tc, cryo-CMOS, interconnect, line resistance, quantum computing, superconductor",
author = "N. Iguchi and H. Numata and M. Tanaka and K. Okamoto and T. Tanaka and K. Uchida and H. Ishikuro and T. Sakamoto and M. Tada",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 IEEE International Interconnect Technology Conference, IITC 2024 ; Conference date: 03-06-2024 Through 06-06-2024",
year = "2024",
doi = "10.1109/IITC61274.2024.10732217",
language = "English",
series = "2024 IEEE International Interconnect Technology Conference, IITC 2024",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2024 IEEE International Interconnect Technology Conference, IITC 2024",
}