3D airflow velocity vector sensor

N. Minh-Dung; H. Takahashi; K. Kuwana; T. Takahata; K. Matsumoto; I. Shimoyama

doi:10.1109/MEMSYS.2011.5734474

3D airflow velocity vector sensor

N. Minh-Dung, H. Takahashi, K. Kuwana, T. Takahata, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

14 Citations (Scopus)

Abstract

In this paper, we propose a sensor for measuring the three-dimensional (3D) velocity vector of airflows. The sensor, which was a 10 mm spherical figure, had a laminated structure with three channels fabricated inside. The components of the airflow velocity vector were measured respectively by three piezo-resistive cantilevers fabricated in each of the three channels. Experiments with a wind tunnel demonstrated that our sensor can measure not only the velocity amplitude but the 3D velocity direction as well.

Original language	English
Title of host publication	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages	513-516
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734474
Publication status	Published - 2011 Apr 13
Externally published	Yes
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 2011 Jan 23 → 2011 Jan 27

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Country/Territory	Mexico
City	Cancun
Period	11/1/23 → 11/1/27

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2011.5734474

Cite this

Minh-Dung, N., Takahashi, H., Kuwana, K., Takahata, T., Matsumoto, K., & Shimoyama, I. (2011). 3D airflow velocity vector sensor. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 513-516). Article 5734474 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734474

3D airflow velocity vector sensor. / Minh-Dung, N.; Takahashi, H.; Kuwana, K. et al.
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 513-516 5734474 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Minh-Dung, N, Takahashi, H, Kuwana, K, Takahata, T, Matsumoto, K & Shimoyama, I 2011, 3D airflow velocity vector sensor. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011., 5734474, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 513-516, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 11/1/23. https://doi.org/10.1109/MEMSYS.2011.5734474

@inproceedings{d15554aa05324656b372bd433af171c5,

title = "3D airflow velocity vector sensor",

abstract = "In this paper, we propose a sensor for measuring the three-dimensional (3D) velocity vector of airflows. The sensor, which was a 10 mm spherical figure, had a laminated structure with three channels fabricated inside. The components of the airflow velocity vector were measured respectively by three piezo-resistive cantilevers fabricated in each of the three channels. Experiments with a wind tunnel demonstrated that our sensor can measure not only the velocity amplitude but the 3D velocity direction as well.",

author = "N. Minh-Dung and H. Takahashi and K. Kuwana and T. Takahata and K. Matsumoto and I. Shimoyama",

year = "2011",

month = apr,

day = "13",

doi = "10.1109/MEMSYS.2011.5734474",

language = "English",

isbn = "9781424496327",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "513--516",

booktitle = "2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011",

note = "24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 ; Conference date: 23-01-2011 Through 27-01-2011",

}

TY - GEN

T1 - 3D airflow velocity vector sensor

AU - Minh-Dung, N.

AU - Takahashi, H.

AU - Kuwana, K.

AU - Takahata, T.

AU - Matsumoto, K.

AU - Shimoyama, I.

PY - 2011/4/13

Y1 - 2011/4/13

N2 - In this paper, we propose a sensor for measuring the three-dimensional (3D) velocity vector of airflows. The sensor, which was a 10 mm spherical figure, had a laminated structure with three channels fabricated inside. The components of the airflow velocity vector were measured respectively by three piezo-resistive cantilevers fabricated in each of the three channels. Experiments with a wind tunnel demonstrated that our sensor can measure not only the velocity amplitude but the 3D velocity direction as well.

AB - In this paper, we propose a sensor for measuring the three-dimensional (3D) velocity vector of airflows. The sensor, which was a 10 mm spherical figure, had a laminated structure with three channels fabricated inside. The components of the airflow velocity vector were measured respectively by three piezo-resistive cantilevers fabricated in each of the three channels. Experiments with a wind tunnel demonstrated that our sensor can measure not only the velocity amplitude but the 3D velocity direction as well.

UR - http://www.scopus.com/inward/record.url?scp=79953796153&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79953796153&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2011.5734474

DO - 10.1109/MEMSYS.2011.5734474

M3 - Conference contribution

AN - SCOPUS:79953796153

SN - 9781424496327

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 513

EP - 516

BT - 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011

T2 - 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011

Y2 - 23 January 2011 through 27 January 2011

ER -

3D airflow velocity vector sensor

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