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6-Axis Force-Torque Sensor Utilizing Four Pairs of Standing Laser-Induced Graphene Cantilevers

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports on a 6-axis force-torque sensor using standing laser-induced graphene (LIG) cantilevers. The proposed sensor consists of eight 3×3mm standing LIG cantilevers embedded in an elastic body that can measure triaxial force and torque. The sensing element is formed by irradiating a polyimide (PI) film with UV and CO2 lasers. Then the flat cantilever is obliquely standing by a thermal deformation process. The fabricated tactile sensors showed independent responses to 6-axis forces.

Original languageEnglish
Title of host publication2023 IEEE SENSORS, SENSORS 2023 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350303872
DOIs
Publication statusPublished - 2023
Event2023 IEEE SENSORS, SENSORS 2023 - Vienna, Austria
Duration: 2023 Oct 29 → 2023 Nov 1

Publication series

NameProceedings of IEEE Sensors
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference2023 IEEE SENSORS, SENSORS 2023
Country/TerritoryAustria
CityVienna
Period23/10/29 → 23/11/1

Keywords

  • 6-axis force-torque sensor
  • Laser-induced graphene
  • Standing cantilever

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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