A correlation between particle growth and spatiotemporal RF plasma structure

T. Kamata; S. Kakuta; Y. Yamaguchi; T. Makabe

doi:10.1088/0963-0252/3/3/011

A correlation between particle growth and spatiotemporal RF plasma structure

T. Kamata, S. Kakuta, Y. Yamaguchi, T. Makabe

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Abstract

Particle growth and subsequent extinction in plasma reactors for surface processing has been investigated in a parallel-plate radiofrequency discharge at 13.56 MHz in Ar with (-CF₂CF₂-)_n and its fragments as an impurity. The space- and time-variation of the radiofrequency plasma structure is mainly studied simultaneously with the particle size and density by both spatiotemporally resolved optical emission spectroscopy and Mie scattering of laser light. A correlation is demonstrated between the particle size/density and the radiofrequency plasma structure.

Original language	English
Article number	011
Pages (from-to)	310-313
Number of pages	4
Journal	Plasma Sources Science and Technology
Volume	3
Issue number	3
DOIs	https://doi.org/10.1088/0963-0252/3/3/011
Publication status	Published - 1994 Dec 1

ASJC Scopus subject areas

Condensed Matter Physics

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AU - Kamata, T.

AU - Kakuta, S.

AU - Yamaguchi, Y.

AU - Makabe, T.

PY - 1994/12/1

Y1 - 1994/12/1

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AB - Particle growth and subsequent extinction in plasma reactors for surface processing has been investigated in a parallel-plate radiofrequency discharge at 13.56 MHz in Ar with (-CF2CF2-)n and its fragments as an impurity. The space- and time-variation of the radiofrequency plasma structure is mainly studied simultaneously with the particle size and density by both spatiotemporally resolved optical emission spectroscopy and Mie scattering of laser light. A correlation is demonstrated between the particle size/density and the radiofrequency plasma structure.

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A correlation between particle growth and spatiotemporal RF plasma structure

Abstract

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