A gas sensor based on viscosity change of ionic liquid

Kazuharu Ohsawa; Hidetoshi Takahashi; Kentaro Noda; Tetsuo Kan; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2011.5734477

A gas sensor based on viscosity change of ionic liquid

Kazuharu Ohsawa, Hidetoshi Takahashi, Kentaro Noda, Tetsuo Kan, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

11 Citations (Scopus)

Abstract

We proposed a gas sensor based on viscosity change of ionic liquid. Our sensor consists of a piezoresistive cantilever immersed in an ionic liquid droplet. When the ionic liquid absorbs gas, the viscosity of the liquid decreases. Thus, the gas concentration is estimated by measuring the viscosity of the ionic liquid. We measured the viscosity change by monitoring the vibration amplitude of the immersed piezoresistive cantilever, which was vibrating in the ionic liquid by the magnetic field. The size of fabricated sensor chip was 1.5 mm × 1.5 mm × 0.3 mm. The cantilever and the volume of the ionic liquid droplet were 300 μm × 200 μm × 0.5 μm and 0.4 ×ℓ, respectively. We demonstrated that the vibration amplitude of the cantilever increased monotonically when acetone concentration rose from 0 to 15 mol%.

Original language	English
Title of host publication	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages	525-528
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734477
Publication status	Published - 2011 Apr 13
Externally published	Yes
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 2011 Jan 23 → 2011 Jan 27

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Country/Territory	Mexico
City	Cancun
Period	11/1/23 → 11/1/27

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2011.5734477

Cite this

Ohsawa, K., Takahashi, H., Noda, K., Kan, T., Matsumoto, K., & Shimoyama, I. (2011). A gas sensor based on viscosity change of ionic liquid. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 525-528). Article 5734477 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734477

A gas sensor based on viscosity change of ionic liquid. / Ohsawa, Kazuharu; Takahashi, Hidetoshi; Noda, Kentaro et al.
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 525-528 5734477 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ohsawa, K, Takahashi, H, Noda, K, Kan, T, Matsumoto, K & Shimoyama, I 2011, A gas sensor based on viscosity change of ionic liquid. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011., 5734477, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 525-528, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 11/1/23. https://doi.org/10.1109/MEMSYS.2011.5734477

@inproceedings{6fafebe7ce6446ca975d51d288799ee4,

title = "A gas sensor based on viscosity change of ionic liquid",

abstract = "We proposed a gas sensor based on viscosity change of ionic liquid. Our sensor consists of a piezoresistive cantilever immersed in an ionic liquid droplet. When the ionic liquid absorbs gas, the viscosity of the liquid decreases. Thus, the gas concentration is estimated by measuring the viscosity of the ionic liquid. We measured the viscosity change by monitoring the vibration amplitude of the immersed piezoresistive cantilever, which was vibrating in the ionic liquid by the magnetic field. The size of fabricated sensor chip was 1.5 mm × 1.5 mm × 0.3 mm. The cantilever and the volume of the ionic liquid droplet were 300 μm × 200 μm × 0.5 μm and 0.4 ×ℓ, respectively. We demonstrated that the vibration amplitude of the cantilever increased monotonically when acetone concentration rose from 0 to 15 mol%.",

author = "Kazuharu Ohsawa and Hidetoshi Takahashi and Kentaro Noda and Tetsuo Kan and Kiyoshi Matsumoto and Isao Shimoyama",

year = "2011",

month = apr,

day = "13",

doi = "10.1109/MEMSYS.2011.5734477",

language = "English",

isbn = "9781424496327",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "525--528",

booktitle = "2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011",

note = "24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 ; Conference date: 23-01-2011 Through 27-01-2011",

}

TY - GEN

T1 - A gas sensor based on viscosity change of ionic liquid

AU - Ohsawa, Kazuharu

AU - Takahashi, Hidetoshi

AU - Noda, Kentaro

AU - Kan, Tetsuo

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

PY - 2011/4/13

Y1 - 2011/4/13

N2 - We proposed a gas sensor based on viscosity change of ionic liquid. Our sensor consists of a piezoresistive cantilever immersed in an ionic liquid droplet. When the ionic liquid absorbs gas, the viscosity of the liquid decreases. Thus, the gas concentration is estimated by measuring the viscosity of the ionic liquid. We measured the viscosity change by monitoring the vibration amplitude of the immersed piezoresistive cantilever, which was vibrating in the ionic liquid by the magnetic field. The size of fabricated sensor chip was 1.5 mm × 1.5 mm × 0.3 mm. The cantilever and the volume of the ionic liquid droplet were 300 μm × 200 μm × 0.5 μm and 0.4 ×ℓ, respectively. We demonstrated that the vibration amplitude of the cantilever increased monotonically when acetone concentration rose from 0 to 15 mol%.

AB - We proposed a gas sensor based on viscosity change of ionic liquid. Our sensor consists of a piezoresistive cantilever immersed in an ionic liquid droplet. When the ionic liquid absorbs gas, the viscosity of the liquid decreases. Thus, the gas concentration is estimated by measuring the viscosity of the ionic liquid. We measured the viscosity change by monitoring the vibration amplitude of the immersed piezoresistive cantilever, which was vibrating in the ionic liquid by the magnetic field. The size of fabricated sensor chip was 1.5 mm × 1.5 mm × 0.3 mm. The cantilever and the volume of the ionic liquid droplet were 300 μm × 200 μm × 0.5 μm and 0.4 ×ℓ, respectively. We demonstrated that the vibration amplitude of the cantilever increased monotonically when acetone concentration rose from 0 to 15 mol%.

UR - http://www.scopus.com/inward/record.url?scp=79953801466&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79953801466&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2011.5734477

DO - 10.1109/MEMSYS.2011.5734477

M3 - Conference contribution

AN - SCOPUS:79953801466

SN - 9781424496327

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 525

EP - 528

BT - 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011

T2 - 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011

Y2 - 23 January 2011 through 27 January 2011

ER -

A gas sensor based on viscosity change of ionic liquid

Abstract

Publication series

Other

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this