TY - JOUR
T1 - A method for evaluations on the radiation trapping in an inductively coupled plasma in argon
AU - Scharwitz, Christian
AU - Makabe, Toshiaki
N1 - Funding Information:
C. Scharwitz gratefully acknowledges Y. Hayashi for his support on the ICP and OES setups. This research project is supported by a Grant-in-Aid for the Global COE Program in High-Level Global Cooperation for Leading-Edge Platform on Access Spaces in Keio University from MEXT of Japan. FIG. 1. Sketch of the argon levels and transitions under consideration (see Tables I and II ). FIG. 2. Schematic diagram of the ICP employed in the present measurement. FIG. 3. θ u l n 2 p 2 in an ICP at p = 100 mTorr for transitions, 2 p 2 − 1 s 2 , 2 p 2 − 1 s 4 , and 2 p 2 − 1 s 5 as a function of I coil . Escape factor θ 2 p 2 1 s 5 is also shown. FIG. 4. θ 2 p 9 1 s 5 n 2 p 9 and n 2 p 9 ′ in an ICP at p = 100 mTorr as a function of I coil . FIG. 5. θ 2 p 9 1 s 5 n 2 p 9 and n 2 p 9 ′ in an ICP at I coil = 30 A as a function of p . FIG. 6. Escape factor θ 2 p 9 1 s 5 in an ICP at I coil = 30 , 40, and 50 A as a function of p . FIG. 7. θ 2 p 6 1 s 4 n 2 p 6 and n 2 p 6 ′ in an ICP at p = 100 mTorr as a function of I coil . FIG. 8. θ 2 p 6 1 s 4 n 2 p 6 and n 2 p 6 ′ in an ICP at I coil = 30 A as a function of p . Table I. Atomic argon levels (Ref. 20 ) used in this paper, in Paschen notation (Ref. 21 ). Level Energy Manifold 1 s 5 11.54 eV 3 s 2 3 p 5 4 s 1 s 4 11.62 eV 3 s 2 3 p 5 4 s 1 s 2 11.83 eV 3 s 2 3 p 5 4 s 2 p 9 13.08 eV 3 s 2 3 p 5 4 p 2 p 6 13.17 eV 3 s 2 3 p 5 4 p 2 p 3 13.30 eV 3 s 2 3 p 5 4 p 2 p 2 13.33 eV 3 s 2 3 p 5 4 p 4 d 3 14.74 eV 3 s 2 3 p 5 4 d 4 s 1 ‴ 14.97 eV 3 s 2 3 p 5 4 d Table II. Atomic data (Ref. 20 ) of the used argon transitions, ordered by λ u l . Transition Wavelength λ u l A u l g u g l 4 s 1 ‴ − 2 p 9 653.81 nm 1.1 × 10 5 s − 1 7 7 2 p 2 − 1 s 5 696.54 nm 6.39 × 10 6 s − 1 3 5 2 p 2 − 1 s 4 727.29 nm 1.83 × 10 6 s − 1 3 3 2 p 3 − 1 s 4 738.4 nm 8.47 × 10 6 s − 1 5 3 4 s 1 ‴ − 2 p 3 742.53 nm 3.1 × 10 5 s − 1 7 5 4 d 3 − 2 p 6 789.11 nm 9.5 × 10 5 s − 1 5 5 2 p 6 − 1 s 4 800.62 nm 4.9 × 10 6 s − 1 5 3 2 p 9 − 1 s 5 811.53 nm 3.31 × 10 6 s − 1 7 5 2 p 2 − 1 s 2 826.45 nm 1.53 × 10 7 s − 1 3 3 4 d 3 − 2 p 3 860.58 nm 1.04 × 10 6 s − 1 5 5
PY - 2009
Y1 - 2009
N2 - One of the general challenges for the evaluation and interpretation of optical emission spectroscopy measurements is the occurrence of radiation trapping, which is also named self-absorption or opacity. A convenient technique to treat radiation trapping is the introduction of a parameter, which is called escape factor and gives a measure for the amount of radiation trapping. In this paper evaluations on the concept of escape factors are presented for an inductively coupled plasma in argon. Especially, the strong argon line at 811.53 nm, which arises from the transition of 2p9-1s5, is under consideration. To estimate escape factors for this line, a particular method is proposed and presented here. First experimental results are obtained under the restrictive assumptions that transitions into the resonant levels 1s2 and 1s4 are sufficiently optically thin and ratios of population densities are constant.
AB - One of the general challenges for the evaluation and interpretation of optical emission spectroscopy measurements is the occurrence of radiation trapping, which is also named self-absorption or opacity. A convenient technique to treat radiation trapping is the introduction of a parameter, which is called escape factor and gives a measure for the amount of radiation trapping. In this paper evaluations on the concept of escape factors are presented for an inductively coupled plasma in argon. Especially, the strong argon line at 811.53 nm, which arises from the transition of 2p9-1s5, is under consideration. To estimate escape factors for this line, a particular method is proposed and presented here. First experimental results are obtained under the restrictive assumptions that transitions into the resonant levels 1s2 and 1s4 are sufficiently optically thin and ratios of population densities are constant.
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U2 - 10.1063/1.3262566
DO - 10.1063/1.3262566
M3 - Article
AN - SCOPUS:72449205517
SN - 0021-8979
VL - 106
JO - Journal of Applied Physics
JF - Journal of Applied Physics
IS - 11
M1 - 113304
ER -