A multi-degree-of-freedom ultrasonic motor using single-phase-driven vibrators

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)


This paper presents a novel type of multi degree-of-freedom ultrasonic motors. Today, in various fields, actuators having multi degrees-of-freedom is needed. In the past, many multi-degree-of-freedom actuators have been developed. However, they are all still large and heavy. Thus, we propose a miniature multi-degree-of-freedom actuator using plural single-phase-driven ultrasonic vibrators. A single-phase-driven ultrasonic motor is known for its miniaturizing facility. On the other hand, it is also known for its lack of output force. Therefore, we proposed to use plural single-phase-driven vibrators and also tried to make one vibrator generate great force. This motor has many small vibrators; each one having four patterns in the thrust direction. By controlling the frequency of each vibrator, we can obtain multiple movements of a movable object. First, we proposed the principles of this motor. Next, we selected vibration modes and designed the size of a vibrator to be 10 ×7.5 ×0.9 mm3 using finite element analysis. Finally, we measured frequency, vibration, and driving characteristics of the vibrators. The maximum thrust was about 3.14 N and the maximum torque was about 6 mN-m.

Original languageEnglish
Title of host publication2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS
PublisherIEEE Computer Society
Number of pages6
ISBN (Print)0780389123, 9780780389120
Publication statusPublished - 2005

Publication series

Name2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS


  • Multi-degree-of-freedom
  • Piezoelectric actuator
  • Ultrasonic motor

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction
  • Control and Systems Engineering


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