TY - GEN
T1 - A peristaltic micropump using traveling waves of polymer membranes driven by a single actuator
AU - Nakahara, K.
AU - Yoshimura, K.
AU - Okayama, Y.
AU - Miki, N.
PY - 2011/4/13
Y1 - 2011/4/13
N2 - We demonstrate a peristaltic micropump that utilizes traveling waves of polymer membranes to transport liquids. This micropump does not require any valves and more importantly, the traveling waves can be generated by a single actuator. The micropump contains hydraulic displacement amplification mechanism (HDAM) that encapsulates incompressible glycerin in a micro chamber that has different cross-sectional area at the top and the bottom to amplify the amplitude of the traveling waves. The manufactured micropump achieved a flow rate of 1.3 ml/min, which was by far more efficient than a micropump without HDAM.
AB - We demonstrate a peristaltic micropump that utilizes traveling waves of polymer membranes to transport liquids. This micropump does not require any valves and more importantly, the traveling waves can be generated by a single actuator. The micropump contains hydraulic displacement amplification mechanism (HDAM) that encapsulates incompressible glycerin in a micro chamber that has different cross-sectional area at the top and the bottom to amplify the amplitude of the traveling waves. The manufactured micropump achieved a flow rate of 1.3 ml/min, which was by far more efficient than a micropump without HDAM.
UR - http://www.scopus.com/inward/record.url?scp=79953773387&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79953773387&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2011.5734617
DO - 10.1109/MEMSYS.2011.5734617
M3 - Conference contribution
AN - SCOPUS:79953773387
SN - 9781424496327
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1083
EP - 1086
BT - 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
T2 - 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Y2 - 23 January 2011 through 27 January 2011
ER -