A unified simulation of schottky and ohmic contacts

Kazuya Matsuzawa, Ken Uchida, Akira Nishiyama

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)


The Schottky contact is an important consideration in the development of semiconductor devices. This paper shows that a practical Schottky contact model is available for a unified device simulation of Schottky and ohmic contacts. The present model includes the thermionic emission at the metal/semiconductor interface and the spatially distributed tunneling calculated at each grid of semiconductor around the interface. Simulation results of rectifying characteristics of Schottky barrier diodes (SBD's) and contact resistances under high impurity concentration conditions are reasonable compared with measurements. As examples of application to actual devices the influence of the contact resistance on salicided MOSFET's with source/drain extension and the immunity of Schottky barrier tunnel transistors (SBTT's) from the shortchannel effect (SCE) are demonstrated.

Original languageEnglish
Pages (from-to)103108
Number of pages1
JournalIEEE Transactions on Electron Devices
Issue number1
Publication statusPublished - 2000
Externally publishedYes


  • Device simulation
  • Ohmic
  • Salicide
  • Schottky

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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