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A vertical bubble flow network using inductive-coupling for 3-D CMPs
Hiroki Matsutani, Yasuhiro Take, Daisuke Sasaki, Masayuki Kimura, Yuki Ono, Yukinori Nishiyama, Michihiro Koibuchi, Tadahiro Kuroda, Hideharu Amano
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
17
Citations
(Scopus)