Absolute measurement of the excitation rate and density of the excited species in an RF discharge from optical emission spectroscopy

F. Tochikubo, T. Makabe

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Absolute measurement of the excitation rate and density of the excited species in an RF discharge from optical emission spectroscopy'. Together they form a unique fingerprint.

Engineering & Materials Science

Mathematics

Physics & Astronomy