Absolute pressure sensors by air-tight electrical feedthrough structure

Engineering & Materials Science

• Pressure sensors 76%
• Glass 42%
• Silicon 42%
• Air 39%
• Metals 22%
• Capacitive sensors 22%
• Leakage (fluid) 20%
• Sensor arrays 19%
• Evaporation 17%
• Masks 16%
• Drilling 15%
• Imaging techniques 13%
• Fabrication 13%
• Sensors 9%

Physics & Astronomy

• pressure sensors 78%
• air 42%
• cavities 32%
• glass 31%
• silicon 28%
• sensors 21%
• drilling 20%
• borosilicate glass 20%
• metals 18%
• electric contacts 15%
• masks 15%
• leakage 14%
• evaporation 13%
• fabrication 10%

Chemical Compounds

• Pressure Sensor 100%
• Glass 24%
• Metal 16%
• Evaporation 15%
• Force 12%