Advanced top-down fabrication for a fused silica nanofluidic device

Kyojiro Morikawa, Yutaka Kazoe, Yuto Takagi, Yoshiyuki Tsuyama, Yuriy Pihosh, Takehiko Tsukahara, Takehiko Kitamori

Research output: Contribution to journalArticlepeer-review

34 Citations (Scopus)

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Engineering & Materials Science