Abstract
This paper reports on an air pressure sensor for the measurement of the aerodynamic force on an insect wing. A piezoresistive cantilever was fabricated as a pressure sensor. The size of the cantilever was 250μm × 200 μm × 0.3 μm. The sensitivity to air pressure was 0.29 × 10 -3 Pa-1 below 2.0 kHz. By attaching the sensors on the prototype of an insect wing, pressure distribution over the surface were measured when the flow was both steady and unsteady.
Original language | English |
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Article number | 4805510 |
Pages (from-to) | 825-828 |
Number of pages | 4 |
Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
DOIs | |
Publication status | Published - 2009 Jun 1 |
Externally published | Yes |
Event | 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 2009 Jan 25 → 2009 Jan 29 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering