An EXAFS and XANES study of MBE grown Cu-doped ZnO

P. Fons, A. Yamada, K. Iwata, K. Matsubara, S. Niki, K. Nakahara, H. Takasu

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)


The wide bandgap semiconductor, ZnO, is intrinsically n-type and one of the remaining hurdles to be overcome before it can be used for optoelectronic applications is achieving p-type doping. A potential candidate for a p-type dopant is Cu. Towards this end, X-ray near-edge absorption (XANES) has been used to determine changes in valency of Cu in molecular beam epitaxial grown ZnO as a function of growth parameters. Growth parameters varied include the Cu flux which was varied over roughly three orders of magnitude TCu = 800-1000 °C and two substrate temperatures: 300 and 600 °C. XANES measurements confirmed that Cu was in the +1 valence state for all as-grown samples. Preliminary EXAFS measurements also demonstrated that Cu incorporated into a Zn-atom position substitutionally. X-ray diffraction also indicated significant phase separation with the presence of both metallic Cu and CuO indicated for Cu concentrations > 3×1021 cm-3.

Original languageEnglish
Pages (from-to)190-194
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Publication statusPublished - 2003 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation


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