TY - GEN
T1 - Analysis and compensation in specific frequency based on composite filter for nanoscale motion control
AU - Nishi, Fumito
AU - Katsura, Seiichiro
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2014/2/24
Y1 - 2014/2/24
N2 - Nanoscale motion control is required for miniaturization and performance improvement of mechatronics systems. In motion control at nanometer scale, disturbances which do not affect the system at macro scale might greatly influence the control performance. The torque ripple caused by distortion of current is one of the most serious disturbance elements and should be eliminated. To address this problem, the method of the filter designing is proposed in this paper. The effect of the distortion of the current can be reduced by designing the filter in disturbance observer to have low-pass filter and band-stop filter. This paper shows the design method and the stability of force control based on the composite filter. By using high-precision acceleration control based on the proposed method, persistent oscillation can be suppressed, control accuracy can be improved. The validity of the proposal is confirmed by experiments.
AB - Nanoscale motion control is required for miniaturization and performance improvement of mechatronics systems. In motion control at nanometer scale, disturbances which do not affect the system at macro scale might greatly influence the control performance. The torque ripple caused by distortion of current is one of the most serious disturbance elements and should be eliminated. To address this problem, the method of the filter designing is proposed in this paper. The effect of the distortion of the current can be reduced by designing the filter in disturbance observer to have low-pass filter and band-stop filter. This paper shows the design method and the stability of force control based on the composite filter. By using high-precision acceleration control based on the proposed method, persistent oscillation can be suppressed, control accuracy can be improved. The validity of the proposal is confirmed by experiments.
UR - http://www.scopus.com/inward/record.url?scp=84949928890&partnerID=8YFLogxK
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U2 - 10.1109/IECON.2014.7048887
DO - 10.1109/IECON.2014.7048887
M3 - Conference contribution
AN - SCOPUS:84949928890
T3 - IECON Proceedings (Industrial Electronics Conference)
SP - 2695
EP - 2700
BT - IECON Proceedings (Industrial Electronics Conference)
PB - Institute of Electrical and Electronics Engineers Inc.
ER -