Angular Accelerometer with Integrated Liquid Spiral Channel and lig Sensing Element on Polyimide Film

Rihachiro Nakashima; Hidetoshi Takahashi

doi:10.1109/MEMS51670.2022.9699455

Angular Accelerometer with Integrated Liquid Spiral Channel and lig Sensing Element on Polyimide Film

Rihachiro Nakashima, Hidetoshi Takahashi

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports on the fabrication method of an angular accelerometer with integrated liquid spiral channels and laser-induced graphene (LIG) sensing element. The proposed fabrication process forms the LIG sensing element and the spiral grooves via a CO2 laser and a UV laser, respectively, on a polyimide (PI) film. The liquid-sealed spiral channels are fabricated by filling the grooves with silicone oil and applying parylene deposition. Thus, the fabrication process is quite ple. The prototype sensor was validated for its response to angular acceleration.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	747-749
Number of pages	3
ISBN (Electronic)	9781665409117
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699455
Publication status	Published - 2022
Event	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 2022 Jan 9 → 2022 Jan 13

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2022-January
ISSN (Print)	1084-6999

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	22/1/9 → 22/1/13

Keywords

Angular accelerometer
LIG strain gauge
Liquid spiral channel
Parylene deposition

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS51670.2022.9699455

Cite this

Nakashima, R., & Takahashi, H. (2022). Angular Accelerometer with Integrated Liquid Spiral Channel and lig Sensing Element on Polyimide Film. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 747-749). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS51670.2022.9699455

Angular Accelerometer with Integrated Liquid Spiral Channel and lig Sensing Element on Polyimide Film. / Nakashima, Rihachiro; Takahashi, Hidetoshi.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 747-749 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nakashima, R & Takahashi, H 2022, Angular Accelerometer with Integrated Liquid Spiral Channel and lig Sensing Element on Polyimide Film. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2022-January, Institute of Electrical and Electronics Engineers Inc., pp. 747-749, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 22/1/9. https://doi.org/10.1109/MEMS51670.2022.9699455

Nakashima R, Takahashi H. Angular Accelerometer with Integrated Liquid Spiral Channel and lig Sensing Element on Polyimide Film. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc. 2022. p. 747-749. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51670.2022.9699455

Nakashima, Rihachiro ; Takahashi, Hidetoshi. / Angular Accelerometer with Integrated Liquid Spiral Channel and lig Sensing Element on Polyimide Film. 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. pp. 747-749 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Angular Accelerometer with Integrated Liquid Spiral Channel and lig Sensing Element on Polyimide Film",

abstract = "This paper reports on the fabrication method of an angular accelerometer with integrated liquid spiral channels and laser-induced graphene (LIG) sensing element. The proposed fabrication process forms the LIG sensing element and the spiral grooves via a CO2 laser and a UV laser, respectively, on a polyimide (PI) film. The liquid-sealed spiral channels are fabricated by filling the grooves with silicone oil and applying parylene deposition. Thus, the fabrication process is quite ple. The prototype sensor was validated for its response to angular acceleration.",

keywords = "Angular accelerometer, LIG strain gauge, Liquid spiral channel, Parylene deposition",

author = "Rihachiro Nakashima and Hidetoshi Takahashi",

note = "Funding Information: This work was partially supported by the JSPS KAKENHI under Grant 20H02102 and the “Innovation inspired by Nature” Research Support Program, SEKISUI CHEMICAL CO., LTD. Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

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doi = "10.1109/MEMS51670.2022.9699455",

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series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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PY - 2022

Y1 - 2022

N2 - This paper reports on the fabrication method of an angular accelerometer with integrated liquid spiral channels and laser-induced graphene (LIG) sensing element. The proposed fabrication process forms the LIG sensing element and the spiral grooves via a CO2 laser and a UV laser, respectively, on a polyimide (PI) film. The liquid-sealed spiral channels are fabricated by filling the grooves with silicone oil and applying parylene deposition. Thus, the fabrication process is quite ple. The prototype sensor was validated for its response to angular acceleration.

AB - This paper reports on the fabrication method of an angular accelerometer with integrated liquid spiral channels and laser-induced graphene (LIG) sensing element. The proposed fabrication process forms the LIG sensing element and the spiral grooves via a CO2 laser and a UV laser, respectively, on a polyimide (PI) film. The liquid-sealed spiral channels are fabricated by filling the grooves with silicone oil and applying parylene deposition. Thus, the fabrication process is quite ple. The prototype sensor was validated for its response to angular acceleration.

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KW - LIG strain gauge

KW - Liquid spiral channel

KW - Parylene deposition

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BT - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

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Angular Accelerometer with Integrated Liquid Spiral Channel and lig Sensing Element on Polyimide Film

Abstract

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Keywords

ASJC Scopus subject areas

Access to Document

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