Athermal silicon optical circuit using half-etched core and silicone

We propose a temperature-insensitive silicon waveguide using a polymer on the top surface of the cladding. The temperature insensitivity of the waveguide is achieved by combining materials with positive and negative thermo-optic coefficients. The material used for the athermal silicon optical circuit proposed in this study is silicone resin. The length of the temperature compensation waveguide was determined based on the phase shifts in the light. This is because, if TO effect is nullified, there should be no phase variation. We input light into the waveguide and simulated the phase after passing through the temperature compensation structure. The amount of phase shift varied with the length of the waveguide when silicone resin was used for the top surface of the clad. The phase shift of the athermal waveguide was approximately 1% to 12% compared to the phase shift of the conventional waveguide.