Barometric pressure change measurement

N. Minh-Dung; H. Takahashi; K. Matsumoto; I. Shimoyama

doi:10.1109/TRANSDUCERS.2011.5969212

Barometric pressure change measurement

N. Minh-Dung, H. Takahashi, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Citations (Scopus)

Abstract

In this paper, we report a high-sensitivity barometric pressure sensor for use in automotive navigation, personal mobile systems and environmental monitoring. The sensor consisted of an open cavity and a micro piezo-resistive cantilever, which is placed at the cavity's opening. In the proposed structure, the cavity did not need to be vacuum-sealed and the air-gap between the cantilever and its surrounding walls was micrometer order size. The cantilever was used to detect the time-variant interaction between barometric pressure and the pressure inside the cavity. Evaluation experiments demonstrate that the sensor is able to measure the barometric pressure change with high sensitivity, with expected resolution of 0.1 Pa.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	898-901
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969212
Publication status	Published - 2011 Sept 1
Externally published	Yes
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 2011 Jun 5 → 2011 Jun 9

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	11/6/5 → 11/6/9

Keywords

Pressure sensor
air leakage
barometric pressure
open cavity
piezo-resistive cantilever

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2011.5969212

Cite this

Minh-Dung, N., Takahashi, H., Matsumoto, K., & Shimoyama, I. (2011). Barometric pressure change measurement. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 898-901). Article 5969212 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969212

Barometric pressure change measurement. / Minh-Dung, N.; Takahashi, H.; Matsumoto, K. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 898-901 5969212 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Minh-Dung, N, Takahashi, H, Matsumoto, K & Shimoyama, I 2011, Barometric pressure change measurement. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969212, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 898-901, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 11/6/5. https://doi.org/10.1109/TRANSDUCERS.2011.5969212

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author = "N. Minh-Dung and H. Takahashi and K. Matsumoto and I. Shimoyama",

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Barometric pressure change measurement

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Keywords

ASJC Scopus subject areas

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