TY - GEN
T1 - Basic performance analysis of ER gel in vacuum
AU - Shida, Y.
AU - Kakinuma, Y.
AU - Aoyama, T.
AU - Minami, H.
AU - Anzai, H.
PY - 2011
Y1 - 2011
N2 - Electro-rheological gel (ER gel) exhibits various adhesive characteristics according to the applied electric field. This characteristic is called the electro-adhesive effect (EA effect). The results of a recent study reveal that the EA effect also occurs in a vacuum. Therefore, it is expected that ER gel can be applied to a chucking or damping device in a vacuum process. However, the characteristics of ER gel in a vacuum have not been sufficiently clarified. The purpose of this study is to experimentally analyze the characteristic of ER gel in a vacuum. The performance of an ERG fixture element used for a silicon wafer in a vacuum is evaluated through shearing tests. The experimental results indicate that the ER gel demonstrates satisfactory performance in a vacuum. Moreover, the outgas released from the ER gel in a vacuum is evaluated, and the influence of the degassing time on the outgas is investigated.
AB - Electro-rheological gel (ER gel) exhibits various adhesive characteristics according to the applied electric field. This characteristic is called the electro-adhesive effect (EA effect). The results of a recent study reveal that the EA effect also occurs in a vacuum. Therefore, it is expected that ER gel can be applied to a chucking or damping device in a vacuum process. However, the characteristics of ER gel in a vacuum have not been sufficiently clarified. The purpose of this study is to experimentally analyze the characteristic of ER gel in a vacuum. The performance of an ERG fixture element used for a silicon wafer in a vacuum is evaluated through shearing tests. The experimental results indicate that the ER gel demonstrates satisfactory performance in a vacuum. Moreover, the outgas released from the ER gel in a vacuum is evaluated, and the influence of the degassing time on the outgas is investigated.
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U2 - 10.1142/9789814340236_0011
DO - 10.1142/9789814340236_0011
M3 - Conference contribution
AN - SCOPUS:84865630645
SN - 9814340227
SN - 9789814340229
T3 - Electro-Rheological Fluids and Magneto-Rheological Suspensions - Proceedings of the 12th International Conference
SP - 81
EP - 87
BT - Electro-Rheological Fluids and Magneto-Rheological Suspensions - Proceedings of the 12th International Conference
PB - World Scientific Publishing Co. Pte Ltd
T2 - 12th International Conference on Electrorheological Fluids and Magnetorheological Suspensions, ERMR 2010
Y2 - 16 August 2010 through 20 August 2010
ER -