Biaxial Glass Force Plate using Inclined Laser Induced Backside Wet Etching through a Prism

Nozomi Ono; Rihachiro Nakashima; Toshihiro Shiratori; Hidetoshi Takahashi

doi:10.1109/MEMS61431.2025.10918017

Biaxial Glass Force Plate using Inclined Laser Induced Backside Wet Etching through a Prism

Nozomi Ono, Rihachiro Nakashima, Toshihiro Shiratori, Hidetoshi Takahashi

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports a biaxial force plate designed to measure ground reaction forces in small insects. The device utilizes a glass spring structure to detect both vertical and shear forces, with two laser displacement meters for force capture. A V-shaped groove formed by fiber laser-induced backside wet etching through a triangular prism, allows precise biaxial force measurements. The proposed force plate structure can be fabricated entirely using laser beam processing. The fabricated force plate realized a force resolution of 0.37 μN, providing the significantly high sensitivity for fruit fly measurement.

Original language	English
Title of host publication	2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	833-836
Number of pages	4
ISBN (Electronic)	9798331508890
DOIs	https://doi.org/10.1109/MEMS61431.2025.10918017
Publication status	Published - 2025
Event	38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 - Kaohsiung, Taiwan, Province of China Duration: 2025 Jan 19 → 2025 Jan 23

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025
Country/Territory	Taiwan, Province of China
City	Kaohsiung
Period	25/1/19 → 25/1/23

Keywords

Displacement sensors
Force plate
Laser processing
Laser-induced backside wet etching

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS61431.2025.10918017

Cite this

Ono, N., Nakashima, R., Shiratori, T., & Takahashi, H. (2025). Biaxial Glass Force Plate using Inclined Laser Induced Backside Wet Etching through a Prism. In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025 (pp. 833-836). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS61431.2025.10918017

Biaxial Glass Force Plate using Inclined Laser Induced Backside Wet Etching through a Prism. / Ono, Nozomi; Nakashima, Rihachiro; Shiratori, Toshihiro et al.
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. p. 833-836 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ono, N, Nakashima, R, Shiratori, T & Takahashi, H 2025, Biaxial Glass Force Plate using Inclined Laser Induced Backside Wet Etching through a Prism. in 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 833-836, 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025, Kaohsiung, Taiwan, Province of China, 25/1/19. https://doi.org/10.1109/MEMS61431.2025.10918017

Ono N, Nakashima R, Shiratori T, Takahashi H. Biaxial Glass Force Plate using Inclined Laser Induced Backside Wet Etching through a Prism. In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc. 2025. p. 833-836. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS61431.2025.10918017

Ono, Nozomi ; Nakashima, Rihachiro ; Shiratori, Toshihiro et al. / Biaxial Glass Force Plate using Inclined Laser Induced Backside Wet Etching through a Prism. 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. pp. 833-836 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "This paper reports a biaxial force plate designed to measure ground reaction forces in small insects. The device utilizes a glass spring structure to detect both vertical and shear forces, with two laser displacement meters for force capture. A V-shaped groove formed by fiber laser-induced backside wet etching through a triangular prism, allows precise biaxial force measurements. The proposed force plate structure can be fabricated entirely using laser beam processing. The fabricated force plate realized a force resolution of 0.37 μN, providing the significantly high sensitivity for fruit fly measurement.",

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AB - This paper reports a biaxial force plate designed to measure ground reaction forces in small insects. The device utilizes a glass spring structure to detect both vertical and shear forces, with two laser displacement meters for force capture. A V-shaped groove formed by fiber laser-induced backside wet etching through a triangular prism, allows precise biaxial force measurements. The proposed force plate structure can be fabricated entirely using laser beam processing. The fabricated force plate realized a force resolution of 0.37 μN, providing the significantly high sensitivity for fruit fly measurement.

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Biaxial Glass Force Plate using Inclined Laser Induced Backside Wet Etching through a Prism

Abstract

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Keywords

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