Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers

H. Onoe; M. Gel; K. Hoshino; K. Matsumoto; I. Shimoyama

Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers

H. Onoe, M. Gel, K. Hoshino, K. Matsumoto, I. Shimoyama

Research output: Contribution to journal › Conference article › peer-review

Abstract

This paper describes binding force measurement using force-sensing piezoresistive cantilevers, to evaluate binding between micro-scale SiO ₂ flat surfaces in an HCl solution for fluidic micro-self-assembly. We measured binding force between a cylindrical microparticle and a substrate by pushing the particle with the cantilever. We successfully measured the binding force in nano-newton order caused by van der Waals' interaction, and revealed that the phenomenon observed in colloid particles occurred similarly in micro-scale flat surfaces.

Original language	English
Pages (from-to)	16-19
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication status	Published - 2005 Oct 25
Externally published	Yes
Event	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: 2005 Jan 30 → 2005 Feb 3

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers. / Onoe, H.; Gel, M.; Hoshino, K. et al.
In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 25.10.2005, p. 16-19.

Research output: Contribution to journal › Conference article › peer-review

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title = "Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers",

abstract = "This paper describes binding force measurement using force-sensing piezoresistive cantilevers, to evaluate binding between micro-scale SiO 2 flat surfaces in an HCl solution for fluidic micro-self-assembly. We measured binding force between a cylindrical microparticle and a substrate by pushing the particle with the cantilever. We successfully measured the binding force in nano-newton order caused by van der Waals' interaction, and revealed that the phenomenon observed in colloid particles occurred similarly in micro-scale flat surfaces.",

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year = "2005",

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journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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T1 - Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers

AU - Onoe, H.

AU - Gel, M.

AU - Hoshino, K.

AU - Matsumoto, K.

AU - Shimoyama, I.

PY - 2005/10/25

Y1 - 2005/10/25

N2 - This paper describes binding force measurement using force-sensing piezoresistive cantilevers, to evaluate binding between micro-scale SiO 2 flat surfaces in an HCl solution for fluidic micro-self-assembly. We measured binding force between a cylindrical microparticle and a substrate by pushing the particle with the cantilever. We successfully measured the binding force in nano-newton order caused by van der Waals' interaction, and revealed that the phenomenon observed in colloid particles occurred similarly in micro-scale flat surfaces.

AB - This paper describes binding force measurement using force-sensing piezoresistive cantilevers, to evaluate binding between micro-scale SiO 2 flat surfaces in an HCl solution for fluidic micro-self-assembly. We measured binding force between a cylindrical microparticle and a substrate by pushing the particle with the cantilever. We successfully measured the binding force in nano-newton order caused by van der Waals' interaction, and revealed that the phenomenon observed in colloid particles occurred similarly in micro-scale flat surfaces.

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M3 - Conference article

AN - SCOPUS:26844516727

SN - 1084-6999

SP - 16

EP - 19

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

T2 - 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami

Y2 - 30 January 2005 through 3 February 2005

ER -

Binding force measurement between micro-scale flat surfaces in aqueous environment by force-sensing piezoresistive micro-cantilevers

Abstract

ASJC Scopus subject areas

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