This paper reports a cantilever with 10-fold tunable spring constant. The spring constant can be tuned both larger and smaller using Lorentz force generated by direct current which flows through the wiring on the cantilever. We designed the cantilever so that the maximum spring constant change by Lorentz force can be the same order as initial spring constant. The change of the spring constant was evaluated from the resonant frequency shift. The experimental result shows that the resonant frequency can be controlled from 1.1 kHz to 3.8 kHz, and the ratio of the tuned spring constant to the initial value was evaluated to be from 0.22 to 2.6.
|Title of host publication
|MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
|Institute of Electrical and Electronics Engineers Inc.
|Number of pages
|Published - 2016 Feb 26
|29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: 2016 Jan 24 → 2016 Jan 28
|Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
|29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
|16/1/24 → 16/1/28
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering