@inproceedings{3e84086f478a44a7a54cb92280c4b040,
title = "Carbon nanotube technologies for future ULSIs",
author = "Yuji Awano and Naoki Yokoyama",
year = "2003",
doi = "10.1109/VTSA.2003.1252546",
language = "English",
series = "International Symposium on VLSI Technology, Systems, and Applications, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "40--41",
booktitle = "VLSI 2003 - 2003 20th International Symposium on VLSI Technology, Systems and Applications, Proceedings",
note = "20th International Symposium on VLSI Technology, Systems and Applications, VLSI 2003 ; Conference date: 06-10-2003 Through 08-10-2003",
}