Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant

Bichitra Nanda Sahoo, So Young Han, Hyun Tae Kim, Keita Ando, Tae Gon Kim, Bong Kyun Kang, Andreas Klipp, Nagendra Prasad Yerriboina, Jin Goo Park

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6 Citations (Scopus)

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