CNT-FET gas sensor using a functionalized ionic liquid as gate

N. Kiga; Y. Takei; A. Inaba; H. Takahashi; K. Matsumoto; I. Shimoyama

doi:10.1109/MEMSYS.2012.6170306

CNT-FET gas sensor using a functionalized ionic liquid as gate

N. Kiga, Y. Takei, A. Inaba, H. Takahashi, K. Matsumoto, I. Shimoyama

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

13 Citations (Scopus)

Abstract

We propose a gas sensor using combination of carbon nanotubes (CNTs) and ionic liquid (IL). In our research, we used IL, 1-ethyl-3-methyl imidazolium tetrafluoroborate ([EMIM][BF ₄]) which specially absorbs CO ₂ / NH ₃, and polymer, polyethyleneimine (PEI) which absorbs CO ₂. This IL or the mixture of IL and PEI dropped on the CNT-FET were applied as a CNT-FET IL-gate and a surface modification material of CNTs. When the IL absorbs specific gases, the ion types and concentrations change. We measured the change of CNT I-V property by applying a voltage to the IL-gate to attract the ions onto the CNT surface.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	796-799
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170306
Publication status	Published - 2012 May 7
Externally published	Yes
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 2012 Jan 29 → 2012 Feb 2

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	12/1/29 → 12/2/2

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2012.6170306

Cite this

Kiga, N., Takei, Y., Inaba, A., Takahashi, H., Matsumoto, K., & Shimoyama, I. (2012). CNT-FET gas sensor using a functionalized ionic liquid as gate. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 796-799). Article 6170306 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170306

CNT-FET gas sensor using a functionalized ionic liquid as gate. / Kiga, N.; Takei, Y.; Inaba, A. et al.
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 796-799 6170306 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kiga, N, Takei, Y, Inaba, A, Takahashi, H, Matsumoto, K & Shimoyama, I 2012, CNT-FET gas sensor using a functionalized ionic liquid as gate. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170306, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 796-799, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 12/1/29. https://doi.org/10.1109/MEMSYS.2012.6170306

Kiga N, Takei Y, Inaba A, Takahashi H, Matsumoto K, Shimoyama I. CNT-FET gas sensor using a functionalized ionic liquid as gate. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 796-799. 6170306. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2012.6170306

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CNT-FET gas sensor using a functionalized ionic liquid as gate

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