Computer-assisted optical emission tomography in a radiofrequency capacitively coupled plasma

T. Kitajima; M. Izawa; R. Hashido; N. Nakano; T. Makabe

doi:10.1063/1.117882

Computer-assisted optical emission tomography in a radiofrequency capacitively coupled plasma

T. Kitajima, M. Izawa, R. Hashido, N. Nakano, T. Makabe

Department of Electronics and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

Temporal characteristics of two-dimensional (2D) spatial images of a net production rate in a capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by newly developed computer-assisted optical emission tomography. Typical examples are presented for the absolute net formation rate of Ar(3p₅) in Ar for 2 Torr and 13.56 MHz. The tomographic imaging enables us to understand a complex radial discharge structure in a CCP reactor, as well as in the central axial region.

Original language	English
Pages (from-to)	758-760
Number of pages	3
Journal	Applied Physics Letters
Volume	69
Issue number	6
DOIs	https://doi.org/10.1063/1.117882
Publication status	Published - 1996 Aug 5

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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abstract = "Temporal characteristics of two-dimensional (2D) spatial images of a net production rate in a capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by newly developed computer-assisted optical emission tomography. Typical examples are presented for the absolute net formation rate of Ar(3p5) in Ar for 2 Torr and 13.56 MHz. The tomographic imaging enables us to understand a complex radial discharge structure in a CCP reactor, as well as in the central axial region.",

author = "T. Kitajima and M. Izawa and R. Hashido and N. Nakano and T. Makabe",

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AU - Kitajima, T.

AU - Izawa, M.

AU - Hashido, R.

AU - Nakano, N.

AU - Makabe, T.

PY - 1996/8/5

Y1 - 1996/8/5

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AB - Temporal characteristics of two-dimensional (2D) spatial images of a net production rate in a capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by newly developed computer-assisted optical emission tomography. Typical examples are presented for the absolute net formation rate of Ar(3p5) in Ar for 2 Torr and 13.56 MHz. The tomographic imaging enables us to understand a complex radial discharge structure in a CCP reactor, as well as in the central axial region.

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Computer-assisted optical emission tomography in a radiofrequency capacitively coupled plasma

Abstract

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