Control of surface morphology of ZnO (0 0 0 1̄) by hydrochloric acid etching

H. Maki, T. Ikoma, I. Sakaguchi, N. Ohashi, H. Haneda, J. Tanaka, N. Ichinose

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48 Citations (Scopus)


Chemical etching mechanism of ZnO (0 0 0 1̄) polar surface was investigated to control surface morphology. ZnO single crystal surfaces were etched with a HCl solution, and the morphology changes were observed with an atomic force microscope; hexagonal rings formed on the (0 0 0 1̄) surface due to relatively rapid etching of its terrace faces in comparison with kinks or steps of etch pits. Square patterns of Pt thin films were periodically sputtered on ZnO surfaces using a mask; after etched in HCl solution for 1 day, many hillocks formed with keeping the original square shape. The pattern changed into pointed pyramidal shape after long-duration etching, suggesting that the shapes were influenced by the etching along not only the vertical direction, but also a little of the parallel direction to the surface.

Original languageEnglish
Pages (from-to)91-95
Number of pages5
JournalThin Solid Films
Issue number1
Publication statusPublished - 2002 May 22
Externally publishedYes
EventTOEO-2 - Tokyo, Japan
Duration: 2001 Nov 82001 Nov 9


  • Atomic force microscopy (AFM)
  • Etching
  • Scanning electron microscopy
  • Surface morphology
  • Zinc oxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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