Abstract
The service life of a diamond tool in cutting single-crystal silicon is normally very short because of severe tool wear. Therefore, it is important to use a proper coolant in order to restrain tool wear. In this paper, the performances of oil-based and water-based coolants were compared in silicon machining by investigating cutting forces and tool wear geometries. The water-based coolant was found to restrain flank wear more effectively than the oil-based one. The effective tool life using the water-based one was averagely three times longer than that using the oil-based one. The tool wear mechanism might be related to microplasma generated between silicon and diamond during cutting.
| Original language | English |
|---|---|
| Pages (from-to) | 144-150 |
| Number of pages | 7 |
| Journal | Key Engineering Materials |
| Volume | 389-390 |
| Publication status | Published - 2009 |
| Externally published | Yes |
Keywords
- Coolant
- Diamond turning
- Ductile cutting
- Infrared lens
- Single-crystal silicon
- Tool wear
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering