Coolant effects on tool wear in machining single-crystal silicon with diamond tools

Tsutomu Ohta, Jiwang Yan, Sunao Kodera, Shuuma Yajima, Naoyuki Horikawa, Youichi Takahashi, Tsunemoto Kuriyagawa

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


The service life of a diamond tool in cutting single-crystal silicon is normally very short because of severe tool wear. Therefore, it is important to use a proper coolant in order to restrain tool wear. In this paper, the performances of oil-based and water-based coolants were compared in silicon machining by investigating cutting forces and tool wear geometries. The water-based coolant was found to restrain flank wear more effectively than the oil-based one. The effective tool life using the water-based one was averagely three times longer than that using the oil-based one. The tool wear mechanism might be related to microplasma generated between silicon and diamond during cutting.

Original languageEnglish
Pages (from-to)144-150
Number of pages7
JournalKey Engineering Materials
Publication statusPublished - 2009
Externally publishedYes


  • Coolant
  • Diamond turning
  • Ductile cutting
  • Infrared lens
  • Single-crystal silicon
  • Tool wear

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


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