@article{4d133960cb724c27a8564fa2d1f59980,
title = "Crystallographic effects in micro/nanomachining of single-crystal calcium fluoride",
author = "Jiwang Yan and Katsuo Syoji and Jun'ichi Tamaki",
year = "2004",
month = jan,
day = "1",
doi = "10.1116/1.1633770",
language = "English",
volume = "22",
pages = "46--51",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "1",
}