Current-driven phase-change optical gate switch using indium-tin-oxide heater

Kentaro Kato, Masashi Kuwahara, Hitoshi Kawashima, Tohru Tsuruoka, Hiroyuki Tsuda

Research output: Contribution to journalArticlepeer-review

131 Citations (Scopus)


We proposed and fabricated a current-driven phase-change optical gate switch using a Ge2Sb2Te 5 (GST225) thin film, an indium-tin-oxide (ITO) heater, and a Si waveguide. Microfabrication technology compatible with CMOS fabrication was used for the fabrication of the Si waveguide. The repetitive phase changing of GST225 was obtained by injecting a current pulse into the ITO heater beneath the GST225 thin film. The switching operation was observed by injecting a 100-ns current pulse of 20 mA into the ITO heater. The average extinction ratio over the wavelength range of 1,525 to 1,625nm was 1.2 dB.

Original languageEnglish
Article number072201
JournalApplied Physics Express
Issue number7
Publication statusPublished - 2017 Jul

ASJC Scopus subject areas

  • General Engineering
  • General Physics and Astronomy


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