Densification of Sol-Gel Thin Films by Ultraviolet and Vacuum Ultraviolet Irradiations

Hiroaki Imai; Koichi Awazu; Masaru Yasumori; Hideo Onuki; Hiroshi Hirashima

doi:10.1007/BF02436866

Densification of Sol-Gel Thin Films by Ultraviolet and Vacuum Ultraviolet Irradiations

Hiroaki Imai, Koichi Awazu, Masaru Yasumori, Hideo Onuki, Hiroshi Hirashima

Department of Applied Chemistry

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

Structural changes in SiO₂ and TiO₂ gel films were investigated using ultraviolet (UV) and vacuum ultraviolet (VUV) irradiations. A significant compaction with dehydration of SiO₂ gel films was induced by irradiation of photons in the range of 9-18 eV. The refractive index and the shrinkage of the irradiated SiO₂ gel films were comparable to those obtained by sintering at 1000°C. Densification of TiO₂ gel films was also observed with irradiation of 5-14 eV photons. However, effects of the irradiation on TiO₂ gel were smaller that those on SiO₂ gel. The structural changes in the gel films are attributed to electronic excitations which are induced by irradiation with photons having higher energies than the bandgap of the oxides. The photo-induced effects are presumed to depend on the optical properties and structure of the gels.

Original language	English
Pages (from-to)	365-369
Number of pages	5
Journal	Journal of Sol-Gel Science and Technology
Volume	8
Issue number	1-3
DOIs	https://doi.org/10.1007/BF02436866
Publication status	Published - 1997

Keywords

Densification
SiO
Sol-gel
TiO
Ultraviolet

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Chemistry(all)
Biomaterials
Condensed Matter Physics
Materials Chemistry

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10.1007/BF02436866

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title = "Densification of Sol-Gel Thin Films by Ultraviolet and Vacuum Ultraviolet Irradiations",

abstract = "Structural changes in SiO2 and TiO2 gel films were investigated using ultraviolet (UV) and vacuum ultraviolet (VUV) irradiations. A significant compaction with dehydration of SiO2 gel films was induced by irradiation of photons in the range of 9-18 eV. The refractive index and the shrinkage of the irradiated SiO2 gel films were comparable to those obtained by sintering at 1000°C. Densification of TiO2 gel films was also observed with irradiation of 5-14 eV photons. However, effects of the irradiation on TiO2 gel were smaller that those on SiO2 gel. The structural changes in the gel films are attributed to electronic excitations which are induced by irradiation with photons having higher energies than the bandgap of the oxides. The photo-induced effects are presumed to depend on the optical properties and structure of the gels.",

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author = "Hiroaki Imai and Koichi Awazu and Masaru Yasumori and Hideo Onuki and Hiroshi Hirashima",

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doi = "10.1007/BF02436866",

language = "English",

volume = "8",

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T1 - Densification of Sol-Gel Thin Films by Ultraviolet and Vacuum Ultraviolet Irradiations

AU - Imai, Hiroaki

AU - Awazu, Koichi

AU - Yasumori, Masaru

AU - Onuki, Hideo

AU - Hirashima, Hiroshi

PY - 1997

Y1 - 1997

N2 - Structural changes in SiO2 and TiO2 gel films were investigated using ultraviolet (UV) and vacuum ultraviolet (VUV) irradiations. A significant compaction with dehydration of SiO2 gel films was induced by irradiation of photons in the range of 9-18 eV. The refractive index and the shrinkage of the irradiated SiO2 gel films were comparable to those obtained by sintering at 1000°C. Densification of TiO2 gel films was also observed with irradiation of 5-14 eV photons. However, effects of the irradiation on TiO2 gel were smaller that those on SiO2 gel. The structural changes in the gel films are attributed to electronic excitations which are induced by irradiation with photons having higher energies than the bandgap of the oxides. The photo-induced effects are presumed to depend on the optical properties and structure of the gels.

AB - Structural changes in SiO2 and TiO2 gel films were investigated using ultraviolet (UV) and vacuum ultraviolet (VUV) irradiations. A significant compaction with dehydration of SiO2 gel films was induced by irradiation of photons in the range of 9-18 eV. The refractive index and the shrinkage of the irradiated SiO2 gel films were comparable to those obtained by sintering at 1000°C. Densification of TiO2 gel films was also observed with irradiation of 5-14 eV photons. However, effects of the irradiation on TiO2 gel were smaller that those on SiO2 gel. The structural changes in the gel films are attributed to electronic excitations which are induced by irradiation with photons having higher energies than the bandgap of the oxides. The photo-induced effects are presumed to depend on the optical properties and structure of the gels.

KW - Densification

KW - SiO

KW - Sol-gel

KW - TiO

KW - Ultraviolet

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Densification of Sol-Gel Thin Films by Ultraviolet and Vacuum Ultraviolet Irradiations

Abstract

Keywords

ASJC Scopus subject areas

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