Design and control of an ultrasonic motor capable of generating multi-DOF motion

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130 Citations (Scopus)


A multi-degree-of-freedom (DOF) ultrasonic motor consisting of a bar-shaped stator and a spherical rotor was developed. It can generate 3-DOF rotation of the rotor around perpendicular axes using bending vibrations and a longitudinal vibration of the stator, which was designed using finite element analysis. From the simulated driving characteristics, a control method for the ultrasonic motor was proposed. Following this, the driving characteristics of the motor under open-loop control and closed-loop control were measured experimentally. Multi-DOF position control of the rotor was achieved successfully using the proposed control method.

Original languageEnglish
Pages (from-to)499-506
Number of pages8
JournalIEEE/ASME Transactions on Mechatronics
Issue number4
Publication statusPublished - 2001 Dec


  • Finite element analysis
  • Multi-DOF
  • Ultrasonic motor
  • Vibration

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Computer Science Applications
  • Electrical and Electronic Engineering


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