Design and control of an ultrasonic motor capable of generating multi-DOF motion

Kenjiro Takemura; Takashi Maeno

doi:10.1109/3516.974864

Design and control of an ultrasonic motor capable of generating multi-DOF motion

Kenjiro Takemura, Takashi Maeno

Research output: Contribution to journal › Article › peer-review

130 Citations (Scopus)

Abstract

A multi-degree-of-freedom (DOF) ultrasonic motor consisting of a bar-shaped stator and a spherical rotor was developed. It can generate 3-DOF rotation of the rotor around perpendicular axes using bending vibrations and a longitudinal vibration of the stator, which was designed using finite element analysis. From the simulated driving characteristics, a control method for the ultrasonic motor was proposed. Following this, the driving characteristics of the motor under open-loop control and closed-loop control were measured experimentally. Multi-DOF position control of the rotor was achieved successfully using the proposed control method.

Original language	English
Pages (from-to)	499-506
Number of pages	8
Journal	IEEE/ASME Transactions on Mechatronics
Volume	6
Issue number	4
DOIs	https://doi.org/10.1109/3516.974864
Publication status	Published - 2001 Dec

Keywords

Finite element analysis
Multi-DOF
Ultrasonic motor
Vibration

ASJC Scopus subject areas

Control and Systems Engineering
Computer Science Applications
Electrical and Electronic Engineering

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10.1109/3516.974864

Cite this

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title = "Design and control of an ultrasonic motor capable of generating multi-DOF motion",

abstract = "A multi-degree-of-freedom (DOF) ultrasonic motor consisting of a bar-shaped stator and a spherical rotor was developed. It can generate 3-DOF rotation of the rotor around perpendicular axes using bending vibrations and a longitudinal vibration of the stator, which was designed using finite element analysis. From the simulated driving characteristics, a control method for the ultrasonic motor was proposed. Following this, the driving characteristics of the motor under open-loop control and closed-loop control were measured experimentally. Multi-DOF position control of the rotor was achieved successfully using the proposed control method.",

keywords = "Finite element analysis, Multi-DOF, Ultrasonic motor, Vibration",

author = "Kenjiro Takemura and Takashi Maeno",

note = "Funding Information: Manuscript received July 7, 2000; revised April 3, 2001. Recommended by Technical Editor C. H. Menq. This work was supported in part by Canon Inc. K. Takemura is with the Graduate School of Science and Technology, Keio University, Yokohama, 223-8522 Japan (e-mail: kenjiro@mmm-keio.net). T. Maeno is with the Department of Mechanical Engineering, Keio University, Yokohama, 223-8522 Japan (e-mail: maeno@mech.keio.ac.jp). Publisher Item Identifier S 1083-4435(01)10735-0.",

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N2 - A multi-degree-of-freedom (DOF) ultrasonic motor consisting of a bar-shaped stator and a spherical rotor was developed. It can generate 3-DOF rotation of the rotor around perpendicular axes using bending vibrations and a longitudinal vibration of the stator, which was designed using finite element analysis. From the simulated driving characteristics, a control method for the ultrasonic motor was proposed. Following this, the driving characteristics of the motor under open-loop control and closed-loop control were measured experimentally. Multi-DOF position control of the rotor was achieved successfully using the proposed control method.

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KW - Multi-DOF

KW - Ultrasonic motor

KW - Vibration

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Design and control of an ultrasonic motor capable of generating multi-DOF motion

Abstract

Keywords

ASJC Scopus subject areas

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