Design of double nozzle type powder jet device optimized for PJD

Toshihiko Shibuya; Mohammad Saeed Sepasy; Koichi Mizutani; Nobuhito Yoshihara; Jiwang Yan; Tsunemoto Kuriyagawa

Design of double nozzle type powder jet device optimized for PJD

Toshihiko Shibuya, Mohammad Saeed Sepasy, Koichi Mizutani, Nobuhito Yoshihara, Jiwang Yan, Tsunemoto Kuriyagawa

Research output: Contribution to journal › Article › peer-review

Abstract

Thick films are needed in micro-electro-mechanical systems (MEMS) as insulation, piezoelectric and ferroelectric materials. To form the thick film, powder jet deposition (PJD) method has been proposed. In the PJD process, microparticles are sprayed out from nozzle under the conditions of room temperature and atmospheric pressure, and make a film on the substrate. We have developed a new jet mechanism of double-nozzle type, and reported its results previously [I]. In this study, we optimized the shape of the nozzle through investigating the influence of different dimensions and shape of the nozzle on the particles blasting velocity. As a result, it is found that nozzle diameter has a large affect on particles velocity.

Original language	English
Pages (from-to)	398-403
Number of pages	6
Journal	Key Engineering Materials
Volume	389-390
Publication status	Published - 2009 Jan 1
Externally published	Yes

Keywords

Particle image velocimetry
Particle velocity
Powder jet deposition

ASJC Scopus subject areas

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

Cite this

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title = "Design of double nozzle type powder jet device optimized for PJD",

abstract = "Thick films are needed in micro-electro-mechanical systems (MEMS) as insulation, piezoelectric and ferroelectric materials. To form the thick film, powder jet deposition (PJD) method has been proposed. In the PJD process, microparticles are sprayed out from nozzle under the conditions of room temperature and atmospheric pressure, and make a film on the substrate. We have developed a new jet mechanism of double-nozzle type, and reported its results previously [I]. In this study, we optimized the shape of the nozzle through investigating the influence of different dimensions and shape of the nozzle on the particles blasting velocity. As a result, it is found that nozzle diameter has a large affect on particles velocity.",

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AU - Shibuya, Toshihiko

AU - Sepasy, Mohammad Saeed

AU - Mizutani, Koichi

AU - Yoshihara, Nobuhito

AU - Yan, Jiwang

AU - Kuriyagawa, Tsunemoto

PY - 2009/1/1

Y1 - 2009/1/1

N2 - Thick films are needed in micro-electro-mechanical systems (MEMS) as insulation, piezoelectric and ferroelectric materials. To form the thick film, powder jet deposition (PJD) method has been proposed. In the PJD process, microparticles are sprayed out from nozzle under the conditions of room temperature and atmospheric pressure, and make a film on the substrate. We have developed a new jet mechanism of double-nozzle type, and reported its results previously [I]. In this study, we optimized the shape of the nozzle through investigating the influence of different dimensions and shape of the nozzle on the particles blasting velocity. As a result, it is found that nozzle diameter has a large affect on particles velocity.

AB - Thick films are needed in micro-electro-mechanical systems (MEMS) as insulation, piezoelectric and ferroelectric materials. To form the thick film, powder jet deposition (PJD) method has been proposed. In the PJD process, microparticles are sprayed out from nozzle under the conditions of room temperature and atmospheric pressure, and make a film on the substrate. We have developed a new jet mechanism of double-nozzle type, and reported its results previously [I]. In this study, we optimized the shape of the nozzle through investigating the influence of different dimensions and shape of the nozzle on the particles blasting velocity. As a result, it is found that nozzle diameter has a large affect on particles velocity.

KW - Particle image velocimetry

KW - Particle velocity

KW - Powder jet deposition

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Design of double nozzle type powder jet device optimized for PJD

Abstract

Keywords

ASJC Scopus subject areas

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