Detecting Submicron-Scale Continuous Variation in Phase of AC Magnetic Field around Micro-Circuit with Diamond Quantum Sensor

Fuki Otsubo, Takumi Mikawa, Yuichiro Matsuzaki, Norio Tokuda, Norikazu Mizuochi, Junko Ishi-Hayase

Research output: Contribution to conferencePaperpeer-review

Abstract

Magnetic field distribution is significant information for LSI failure analysis. In this study, we detected continuous change in phase of AC magnetic field as well as amplitude utilizing RF-dressed states of electron spins in diamond.

Original languageEnglish
Publication statusPublished - 2024
Event2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 - Incheon, Korea, Republic of
Duration: 2024 Aug 42024 Aug 8

Conference

Conference2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024
Country/TerritoryKorea, Republic of
CityIncheon
Period24/8/424/8/8

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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