Detection principle and verification of non-contact displacement meter with Pico-meter resolution

Hideaki Tamiya; Kayoko Taniguchi; Kazuo Yamazaki; Hideki Aoyama

doi:10.1299/jsmelem.2017.9.027

Detection principle and verification of non-contact displacement meter with Pico-meter resolution

Hideaki Tamiya, Kayoko Taniguchi, Kazuo Yamazaki, Hideki Aoyama

Department of System Design Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

Displacement sensors based on laser or optical fiber technology are well recognized for the non-contact measurement of distance by reflection from the object. These technologies limit the distance of measurement along with the increase of resolution. The other option could be light wave interferometer built with the mirrors on the object. However, long distance measurement requires large and stabilized-wavelength laser source. This report explains another solution; non-contact, grating interferometer displacement sensor which enables Pico-meter resolution with semiconductor laser source.

Original language	English
DOIs	https://doi.org/10.1299/jsmelem.2017.9.027
Publication status	Published - 2017 Nov 13
Event	9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan Duration: 2017 Nov 13 → 2017 Nov 17

Other

Other	9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
Country/Territory	Japan
City	Hiroshima City
Period	17/11/13 → 17/11/17

Keywords

Displacement sensor
Grating interferometer
Non-contact
Pico-meter resolution

ASJC Scopus subject areas

Industrial and Manufacturing Engineering

Access to Document

10.1299/jsmelem.2017.9.027

Cite this

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title = "Detection principle and verification of non-contact displacement meter with Pico-meter resolution",

abstract = "Displacement sensors based on laser or optical fiber technology are well recognized for the non-contact measurement of distance by reflection from the object. These technologies limit the distance of measurement along with the increase of resolution. The other option could be light wave interferometer built with the mirrors on the object. However, long distance measurement requires large and stabilized-wavelength laser source. This report explains another solution; non-contact, grating interferometer displacement sensor which enables Pico-meter resolution with semiconductor laser source.",

keywords = "Displacement sensor, Grating interferometer, Non-contact, Pico-meter resolution",

author = "Hideaki Tamiya and Kayoko Taniguchi and Kazuo Yamazaki and Hideki Aoyama",

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doi = "10.1299/jsmelem.2017.9.027",

language = "English",

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AU - Tamiya, Hideaki

AU - Taniguchi, Kayoko

AU - Yamazaki, Kazuo

AU - Aoyama, Hideki

PY - 2017/11/13

Y1 - 2017/11/13

N2 - Displacement sensors based on laser or optical fiber technology are well recognized for the non-contact measurement of distance by reflection from the object. These technologies limit the distance of measurement along with the increase of resolution. The other option could be light wave interferometer built with the mirrors on the object. However, long distance measurement requires large and stabilized-wavelength laser source. This report explains another solution; non-contact, grating interferometer displacement sensor which enables Pico-meter resolution with semiconductor laser source.

AB - Displacement sensors based on laser or optical fiber technology are well recognized for the non-contact measurement of distance by reflection from the object. These technologies limit the distance of measurement along with the increase of resolution. The other option could be light wave interferometer built with the mirrors on the object. However, long distance measurement requires large and stabilized-wavelength laser source. This report explains another solution; non-contact, grating interferometer displacement sensor which enables Pico-meter resolution with semiconductor laser source.

KW - Displacement sensor

KW - Grating interferometer

KW - Non-contact

KW - Pico-meter resolution

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DO - 10.1299/jsmelem.2017.9.027

M3 - Paper

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T2 - 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017

Y2 - 13 November 2017 through 17 November 2017

ER -

Detection principle and verification of non-contact displacement meter with Pico-meter resolution

Abstract

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Keywords

ASJC Scopus subject areas

Access to Document

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