Development of a catalytic silicon micro-combustor for hydrocarbon-fueled power MEMS

C. M. Spadaccini, X. Zhang, C. P. Cadou, N. Miki, I. A. Waitz

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)


This paper reports the development of a high efficiency, hydrocarbon-fueled micro-combustion system for a micro-scale gas turbine engine for power generation and micro-propulsion applications. A three-wafer catalytic combustor was fabricated and tested. Efficiencies in excess of 40% were achieved for ethylene-air and propane-air combustion. A fabrication process for a six-wafer catalytic combustor was developed and this device was successfully constructed.

Original languageEnglish
Pages (from-to)228-231
Number of pages4
JournalProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2002
Externally publishedYes

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering


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