TY - GEN
T1 - Development of novel Micro Optical Diffusion Sensor using comb-driven Micro Fresnel Mirror
AU - Matoba, Y.
AU - Taguchi, Y.
AU - Nagasaka, Y.
PY - 2013
Y1 - 2013
N2 - We have developed a novel Micro Optical Diffusion Sensor (MODS) with a newly proposed comb-driven Micro Fresnel Mirror (MFM) scanner for the sample which structure is changed drastically. To measure the dynamic change of the conformation of the sample, the fringe pattern should be changed in order to maintain the appropriate excitation condition for the accurate measurement. In this study, the pre-tilted mirror is rotated by the vertical comb-driven actuators to change the mirror angle resulting the change of the fringe spacing. In this paper, we confirmed the validity of the proposed mirror scanner and fabricated the prototype device.
AB - We have developed a novel Micro Optical Diffusion Sensor (MODS) with a newly proposed comb-driven Micro Fresnel Mirror (MFM) scanner for the sample which structure is changed drastically. To measure the dynamic change of the conformation of the sample, the fringe pattern should be changed in order to maintain the appropriate excitation condition for the accurate measurement. In this study, the pre-tilted mirror is rotated by the vertical comb-driven actuators to change the mirror angle resulting the change of the fringe spacing. In this paper, we confirmed the validity of the proposed mirror scanner and fabricated the prototype device.
KW - Comb-driven actuator
KW - Diffusion coefficient
KW - Laser induccd diclectrophoresis
KW - Micro frcsnel mirror
KW - Mlims
UR - http://www.scopus.com/inward/record.url?scp=84907374698&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84907374698&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84907374698
SN - 9781632666246
T3 - 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
SP - 266
EP - 268
BT - 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
PB - Chemical and Biological Microsystems Society
T2 - 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
Y2 - 27 October 2013 through 31 October 2013
ER -