TY - GEN
T1 - Development of novel micro optical diffusion sensor using micro fresnel mirror
AU - Oka, T.
AU - Itani, K.
AU - Taguchi, Y.
AU - Nagasaka, Y.
PY - 2010/12/1
Y1 - 2010/12/1
N2 - We have developed a novel micro optical diffusion sensor (MODS) based on a laser-induced dielectrophoresis (LIDEP), which enables high-speed measurement with a small sample volume and on-site sensing of the protein conformation. We have newly proposed a micro Fresnel mirror (MFM) in order to package a DEP cell and optical components in one chip. MFM, consisting of two angled mirrors, torsion springs, and stiction anchors, can make an excitation laser split into two beams and generate an interference. In this paper, we confirmed the validity of the concept of MFM by the finite element method and the fabricated prototype device.
AB - We have developed a novel micro optical diffusion sensor (MODS) based on a laser-induced dielectrophoresis (LIDEP), which enables high-speed measurement with a small sample volume and on-site sensing of the protein conformation. We have newly proposed a micro Fresnel mirror (MFM) in order to package a DEP cell and optical components in one chip. MFM, consisting of two angled mirrors, torsion springs, and stiction anchors, can make an excitation laser split into two beams and generate an interference. In this paper, we confirmed the validity of the concept of MFM by the finite element method and the fabricated prototype device.
KW - Diffusion coefficient
KW - Laser induced dielectrophoresis
KW - MEMS
KW - Micro Fresnel mirror
UR - http://www.scopus.com/inward/record.url?scp=82955196046&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=82955196046&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:82955196046
SN - 9781618390622
T3 - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
SP - 1292
EP - 1294
BT - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
T2 - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Y2 - 3 October 2010 through 7 October 2010
ER -