Diagnostics of high-frequency discharges in CH4/H2 by time- and space-resolved optical emission spectroscopy

Terukazu Kokubo; Fumiyoshi Tochikubo; Toshiaki Makabe

doi:10.1063/1.103320

Diagnostics of high-frequency discharges in CH₄/H₂ by time- and space-resolved optical emission spectroscopy

Terukazu Kokubo, Fumiyoshi Tochikubo, Toshiaki Makabe

Research output: Contribution to journal › Article › peer-review

31 Citations (Scopus)

Abstract

The diagnostic technique of the rf glow discharge at 13.56 MHz is developed by using the spatiotemporally resolved optical emission spectroscopy. New experimental evidence that the temporal excitation rate at the sheath peaks in phase with the maximum of the total current is obtained in a parallel-plate geometry at 13.56 MHz in CH₄(10%)/H₂ under a typical condition of the plasma chemical vapor deposition of amorphous carbon film at room temperature.

Original language	English
Pages (from-to)	818-820
Number of pages	3
Journal	Applied Physics Letters
Volume	56
Issue number	9
DOIs	https://doi.org/10.1063/1.103320
Publication status	Published - 1990
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.103320

Cite this

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abstract = "The diagnostic technique of the rf glow discharge at 13.56 MHz is developed by using the spatiotemporally resolved optical emission spectroscopy. New experimental evidence that the temporal excitation rate at the sheath peaks in phase with the maximum of the total current is obtained in a parallel-plate geometry at 13.56 MHz in CH4(10%)/H2 under a typical condition of the plasma chemical vapor deposition of amorphous carbon film at room temperature.",

author = "Terukazu Kokubo and Fumiyoshi Tochikubo and Toshiaki Makabe",

year = "1990",

doi = "10.1063/1.103320",

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journal = "Applied Physics Letters",

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AU - Kokubo, Terukazu

AU - Tochikubo, Fumiyoshi

AU - Makabe, Toshiaki

PY - 1990

Y1 - 1990

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AB - The diagnostic technique of the rf glow discharge at 13.56 MHz is developed by using the spatiotemporally resolved optical emission spectroscopy. New experimental evidence that the temporal excitation rate at the sheath peaks in phase with the maximum of the total current is obtained in a parallel-plate geometry at 13.56 MHz in CH4(10%)/H2 under a typical condition of the plasma chemical vapor deposition of amorphous carbon film at room temperature.

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Diagnostics of high-frequency discharges in CH₄/H₂ by time- and space-resolved optical emission spectroscopy

Abstract

ASJC Scopus subject areas

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