Differential pressure sensor using a piezoresistive cantilever

Hidetoshi Takahashi; Nguyen Minh Dung; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1088/0960-1317/22/5/055015

Differential pressure sensor using a piezoresistive cantilever

Hidetoshi Takahashi, Nguyen Minh Dung, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journal › Article › peer-review

121 Citations (Scopus)

Abstract

This paper reports on a differential pressure sensor using a piezoresistive cantilever with the dimensions of 125 m×100 μm×0.3 μm. The sensor has a higher sensitivity than a traditional diaphragm sensor because of the three free edges of the cantilever. The measured results indicated that the fabricated cantilever bent according to theory when differential pressure was applied. The sensitivity and resolution of the differential pressure were 3.2×10 ⁴Pa ¹and 0.02 Pa from20 Pa to 20 Pa, respectively.

Original language	English
Article number	055015
Journal	Journal of Micromechanics and Microengineering
Volume	22
Issue number	5
DOIs	https://doi.org/10.1088/0960-1317/22/5/055015
Publication status	Published - 2012 May
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/22/5/055015

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Differential pressure sensor using a piezoresistive cantilever

Abstract

ASJC Scopus subject areas

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