Direct observation of nitrogen location in molecular beam epitaxy grown nitrogen-doped ZnO

P. Fons, H. Tampo, A. V. Kolobov, M. Ohkubo, S. Niki, J. Tominaga, R. Carboni, S. Friedrich

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)


ZnO is a wide band gap, naturally n-type semiconductor with great promise for optoelectronic applications. To date, however, it has proven difficult to dope p-type, a prerequisite for device fabrication. Nitrogen is widely believed to be one of the most promising dopant candidates, however, experimental results to date have been inconsistent; recent theoretical formation energy calculations have indicated that Nitrogen preferentially incorporates into the ZnO lattice in the form of a N2- molecule at an O-site when a Nitrogen plasma source is used, leading to compensation rather than p-type doping. We show by a combination of X-ray absorption spectroscopy at the N K-edge of plasma-assisted molecular beam epitaxy grown ZnO and ab-initio simulations that in as-grown material, Nitrogen incorporates substitutionally on an O-site where it is expected to act as an acceptor. We have also observed the distinctive formation of molecular nitrogen bubbles upon rapid thermal annealing. These results suggest that effective p-type doping of ZnO with N may only be possible for metastable low-temperature growth processes.

Original languageEnglish
Title of host publicationX-RAY ABSORPTION FINE STRUCTURE - XAFS13
Subtitle of host publication13th International Conference
Number of pages3
Publication statusPublished - 2007
Externally publishedYes
EventX-RAY ABSORPTION FINE STRUCTURE - XAFS13: 13th International Conference - Stanford, CA, United States
Duration: 2006 Jul 92006 Jul 14

Publication series

NameAIP Conference Proceedings
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616


ConferenceX-RAY ABSORPTION FINE STRUCTURE - XAFS13: 13th International Conference
Country/TerritoryUnited States
CityStanford, CA


  • Doping
  • Nitrogen
  • XAFS
  • ZnO

ASJC Scopus subject areas

  • General Physics and Astronomy


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