Ductile Regime Machining of Single-Crystal CaF2 for Aspherical Lenses

J. Yan, J. Tamaki, K. Syoji, T. Kuriyagawa

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Single-crystal calcium fluoride (CaF2) is an important optical material used for dark-field imaging systems and short-wavelength photolithography systems. The fabrication of aspherical lenses using CaF 2 effectively eliminates the problems of color aberration and spherical aberration. The present paper describes a ductile regime machining system developed for fabricating aspherical surfaces on CaF2 by single point diamond turning. In this system, the aspherical surface is enveloped by a straight-nosed diamond tool under three-axis simultaneous numerical control. The formation mechanism of the machining form error is analyzed and a rapid tool setting system is developed to aid the improvement of machining accuracy. The experimental results show that the system is effective for high-efficiency manufacturing of ultra-precision CaF2 optics.

Original languageEnglish
Pages (from-to)95-100
Number of pages6
JournalKey Engineering Materials
Publication statusPublished - 2004 Jan 1
Externally publishedYes


  • Aspherical Lens
  • Brittle Material
  • CaF
  • Calcium Fluoride
  • Diamond Turning
  • Ductile Regime Machining
  • Optics
  • Ultra-Precision Cutting

ASJC Scopus subject areas

  • General Materials Science
  • Mechanics of Materials
  • Mechanical Engineering


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