Effect of atmospheric-pressure plasma jet on polycrystalline diamond micro-milling of silicon carbide

Kazutoshi Katahira; Hitoshi Ohmori; Shogo Takesue; Jun Komotori; Kazuo Yamazaki

doi:10.1016/j.cirp.2015.04.097

Effect of atmospheric-pressure plasma jet on polycrystalline diamond micro-milling of silicon carbide

Kazutoshi Katahira, Hitoshi Ohmori, Shogo Takesue, Jun Komotori, Kazuo Yamazaki

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

37 Citations (Scopus)

Abstract

A study was performed to investigate the effects of the application of an atmospheric-pressure plasma jet during polycrystalline diamond (PCD) micro- end-milling. A comparison was made between SiC surfaces after milling, with and without the application of the plasma jet. The plasma jet was found to allow the formation of a high-quality surface with an average roughness (R_a) of 0.73 nm. The proposed plasma jet is highly effective in improving both the chip formation process, by imparting hydrophilicity to the tool and workpiece surfaces, and removing surface contamination at the tool edge during machining.

Original language	English
Pages (from-to)	129-132
Number of pages	4
Journal	CIRP Annals - Manufacturing Technology
Volume	64
Issue number	1
DOIs	https://doi.org/10.1016/j.cirp.2015.04.097
Publication status	Published - 2015

Keywords

Diamond tool
Micro machining
Silicon carbide

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1016/j.cirp.2015.04.097

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abstract = "A study was performed to investigate the effects of the application of an atmospheric-pressure plasma jet during polycrystalline diamond (PCD) micro- end-milling. A comparison was made between SiC surfaces after milling, with and without the application of the plasma jet. The plasma jet was found to allow the formation of a high-quality surface with an average roughness (Ra) of 0.73 nm. The proposed plasma jet is highly effective in improving both the chip formation process, by imparting hydrophilicity to the tool and workpiece surfaces, and removing surface contamination at the tool edge during machining.",

keywords = "Diamond tool, Micro machining, Silicon carbide",

author = "Kazutoshi Katahira and Hitoshi Ohmori and Shogo Takesue and Jun Komotori and Kazuo Yamazaki",

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AU - Katahira, Kazutoshi

AU - Ohmori, Hitoshi

AU - Takesue, Shogo

AU - Komotori, Jun

AU - Yamazaki, Kazuo

PY - 2015

Y1 - 2015

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AB - A study was performed to investigate the effects of the application of an atmospheric-pressure plasma jet during polycrystalline diamond (PCD) micro- end-milling. A comparison was made between SiC surfaces after milling, with and without the application of the plasma jet. The plasma jet was found to allow the formation of a high-quality surface with an average roughness (Ra) of 0.73 nm. The proposed plasma jet is highly effective in improving both the chip formation process, by imparting hydrophilicity to the tool and workpiece surfaces, and removing surface contamination at the tool edge during machining.

KW - Diamond tool

KW - Micro machining

KW - Silicon carbide

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Effect of atmospheric-pressure plasma jet on polycrystalline diamond micro-milling of silicon carbide

Abstract

Keywords

ASJC Scopus subject areas

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