Abstract
This paper investigates the effect of the addition of nitrogen in FePt layers for ultrathin FePt/AlN multilayer structures. X-ray diffraction results reveal that a compressive stress relaxation occurs after annealing owing to the release of interstitial nitrogen atoms in the FePt layers. The introduction of nitrogen also induces a large in-plane compressive strain during grain growth not seen in FePt deposited without nitrogen. This strain is considered to decrease the driving force for (111) grain growth and FePt ordering.
Original language | English |
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Article number | 051506 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 32 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2014 Sept |
Externally published | Yes |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films