Effects of Al contents on microstructures of Cr1-XAlXN and Zr1-XAlXN films synthesized by cathodic arc method

Hiroyuki Hasegawa; Masahiro Kawate; Tetsuya Suzuki

doi:10.1016/j.surfcoat.2004.08.208

Effects of Al contents on microstructures of Cr_1-XAl_XN and Zr_1-XAl_XN films synthesized by cathodic arc method

Hiroyuki Hasegawa, Masahiro Kawate, Tetsuya Suzuki

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

66 Citations (Scopus)

Abstract

Cr_1-XAl_XN and Zr_1-XAl_XN (0≤×≤1.0) films were synthesized by the cathodic arc method using alloy and metal targets. The X-ray diffraction patterns showed that the Cr_1-XAl_XN changed from cubic structure at X=0.6 to hexagonal structure at X=0.7. The peaks of Zr_1-XAl_XN showed the NaCl structure at X=0.37 and changed to wurtzite structure at X=0.50. The lattice parameter of Cr_1-XAl_XN films changed from 0.416 nm (X=0) to 0.413 nm (X=1.0), and that of Zr_1-XAl_XN changed from 0.458 nm (X=0) to 0.444 nm (X=0.37). The maximum microhardness of Cr_1-XAl_XN and Zr_1-XAl_XN films was 27 GPa (X=0.6) and 29 GPa (X=0.37), respectively. Changes in microstructures-related transition from the cubic to hexagonal were studied, and corresponding hardness changes were discussed in Cr_1-XAl_XN and Zr_1-XAl_XN.

Original language	English
Pages (from-to)	2409-2413
Number of pages	5
Journal	Surface and Coatings Technology
Volume	200
Issue number	7
DOIs	https://doi.org/10.1016/j.surfcoat.2004.08.208
Publication status	Published - 2005 Dec 21

Keywords

CrAlN
Microhardness
Microstructure
ZrAlN

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

Access to Document

10.1016/j.surfcoat.2004.08.208

Cite this

@article{4ef042df498f45dba84408cbcbfddff8,

title = "Effects of Al contents on microstructures of Cr1-XAlXN and Zr1-XAlXN films synthesized by cathodic arc method",

abstract = "Cr1-XAlXN and Zr1-XAlXN (0≤×≤1.0) films were synthesized by the cathodic arc method using alloy and metal targets. The X-ray diffraction patterns showed that the Cr1-XAlXN changed from cubic structure at X=0.6 to hexagonal structure at X=0.7. The peaks of Zr1-XAlXN showed the NaCl structure at X=0.37 and changed to wurtzite structure at X=0.50. The lattice parameter of Cr1-XAlXN films changed from 0.416 nm (X=0) to 0.413 nm (X=1.0), and that of Zr1-XAlXN changed from 0.458 nm (X=0) to 0.444 nm (X=0.37). The maximum microhardness of Cr1-XAlXN and Zr1-XAlXN films was 27 GPa (X=0.6) and 29 GPa (X=0.37), respectively. Changes in microstructures-related transition from the cubic to hexagonal were studied, and corresponding hardness changes were discussed in Cr1-XAlXN and Zr1-XAlXN.",

keywords = "CrAlN, Microhardness, Microstructure, ZrAlN",

author = "Hiroyuki Hasegawa and Masahiro Kawate and Tetsuya Suzuki",

note = "Funding Information: This work was supported by Grant-in-Aid for the 21st Century COE program “KEIO Life-Conjugated Chemistry” and the Japan Society for the Promotion of Science from the Ministry of Education, Culture, Sports, Science, and Technology, Japan.",

year = "2005",

month = dec,

day = "21",

doi = "10.1016/j.surfcoat.2004.08.208",

language = "English",

volume = "200",

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journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier",

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T1 - Effects of Al contents on microstructures of Cr1-XAlXN and Zr1-XAlXN films synthesized by cathodic arc method

AU - Hasegawa, Hiroyuki

AU - Kawate, Masahiro

AU - Suzuki, Tetsuya

N1 - Funding Information: This work was supported by Grant-in-Aid for the 21st Century COE program “KEIO Life-Conjugated Chemistry” and the Japan Society for the Promotion of Science from the Ministry of Education, Culture, Sports, Science, and Technology, Japan.

PY - 2005/12/21

Y1 - 2005/12/21

N2 - Cr1-XAlXN and Zr1-XAlXN (0≤×≤1.0) films were synthesized by the cathodic arc method using alloy and metal targets. The X-ray diffraction patterns showed that the Cr1-XAlXN changed from cubic structure at X=0.6 to hexagonal structure at X=0.7. The peaks of Zr1-XAlXN showed the NaCl structure at X=0.37 and changed to wurtzite structure at X=0.50. The lattice parameter of Cr1-XAlXN films changed from 0.416 nm (X=0) to 0.413 nm (X=1.0), and that of Zr1-XAlXN changed from 0.458 nm (X=0) to 0.444 nm (X=0.37). The maximum microhardness of Cr1-XAlXN and Zr1-XAlXN films was 27 GPa (X=0.6) and 29 GPa (X=0.37), respectively. Changes in microstructures-related transition from the cubic to hexagonal were studied, and corresponding hardness changes were discussed in Cr1-XAlXN and Zr1-XAlXN.

AB - Cr1-XAlXN and Zr1-XAlXN (0≤×≤1.0) films were synthesized by the cathodic arc method using alloy and metal targets. The X-ray diffraction patterns showed that the Cr1-XAlXN changed from cubic structure at X=0.6 to hexagonal structure at X=0.7. The peaks of Zr1-XAlXN showed the NaCl structure at X=0.37 and changed to wurtzite structure at X=0.50. The lattice parameter of Cr1-XAlXN films changed from 0.416 nm (X=0) to 0.413 nm (X=1.0), and that of Zr1-XAlXN changed from 0.458 nm (X=0) to 0.444 nm (X=0.37). The maximum microhardness of Cr1-XAlXN and Zr1-XAlXN films was 27 GPa (X=0.6) and 29 GPa (X=0.37), respectively. Changes in microstructures-related transition from the cubic to hexagonal were studied, and corresponding hardness changes were discussed in Cr1-XAlXN and Zr1-XAlXN.

KW - CrAlN

KW - Microhardness

KW - Microstructure

KW - ZrAlN

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