Electrical resistivity measurements of layer number determined multilayer graphene wiring for future large scale integrated circuit interconnects

Kazuyuki Ito, Masayuki Katagiri, Tadashi Sakai, Yuji Awano

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

To investigate the feasibility of nanocarbon interconnects for future LSIs, the electrical resistance of exfoliated multilayer graphene (MLG) wirings has been studied with accurate measurements of the number of layers. We employed transmission electron microscopy (TEM) as an exact number determination method, atomic force microscopy (AFM) as a simple method, and an extended optical contrast method as an easy distinction method, which we proposed for determining the number of layers. The sheet resistance of MLG wirings, including TEM determined 3-, 54-, and 341-layer MLGs, has been measured using the four-probe method and the layer number dependence of sheet resistance was discussed on the basis of a ladder circuit model simulation. It is shown that the dependence agrees well with the simulations, suggesting parallel conduction in MLG wirings, even if the probe electrodes are deposited just on the top layer of MLG.

Original languageEnglish
Article number06GD08
JournalJapanese journal of applied physics
Volume52
Issue number6 PART 2
DOIs
Publication statusPublished - 2013 Jun
Externally publishedYes

ASJC Scopus subject areas

  • General Engineering
  • General Physics and Astronomy

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