Electro-mechanical Q factor control of photonic crystal nanobeam cavity

Ryuichi Ohta, Yasutomo Ota, Hiroyuki Takagi, Naoto Kumagai, Katsuaki Tanabe, Satomi Ishida, Satoshi Iwamoto, Yasuhiko Arakawa

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


We design and demonstrate a photonic crystal nanobeam cavity with a Q factor controllable by a micro-electro-mechanical system (MEMS). The cavity is evanescently coupled to an adjacent nanobeam waveguide, and its Q factor is controlled by electro-mechanically adjusting the gap distance between them. We experimentally demonstrate control of the Q factor from 2,250 to 2,750, by applying voltage from 0 to 11 V.

Original languageEnglish
Article number04CG01
JournalJapanese journal of applied physics
Issue number4 PART 2
Publication statusPublished - 2013 Apr
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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