We design and demonstrate a photonic crystal nanobeam cavity with a Q factor controllable by a micro-electro-mechanical system (MEMS). The cavity is evanescently coupled to an adjacent nanobeam waveguide, and its Q factor is controlled by electro-mechanically adjusting the gap distance between them. We experimentally demonstrate control of the Q factor from 2,250 to 2,750, by applying voltage from 0 to 11 V.
ASJC Scopus subject areas
- Physics and Astronomy(all)