TY - JOUR
T1 - Electro-mechanical Q factor control of photonic crystal nanobeam cavity
AU - Ohta, Ryuichi
AU - Ota, Yasutomo
AU - Takagi, Hiroyuki
AU - Kumagai, Naoto
AU - Tanabe, Katsuaki
AU - Ishida, Satomi
AU - Iwamoto, Satoshi
AU - Arakawa, Yasuhiko
PY - 2013/4
Y1 - 2013/4
N2 - We design and demonstrate a photonic crystal nanobeam cavity with a Q factor controllable by a micro-electro-mechanical system (MEMS). The cavity is evanescently coupled to an adjacent nanobeam waveguide, and its Q factor is controlled by electro-mechanically adjusting the gap distance between them. We experimentally demonstrate control of the Q factor from 2,250 to 2,750, by applying voltage from 0 to 11 V.
AB - We design and demonstrate a photonic crystal nanobeam cavity with a Q factor controllable by a micro-electro-mechanical system (MEMS). The cavity is evanescently coupled to an adjacent nanobeam waveguide, and its Q factor is controlled by electro-mechanically adjusting the gap distance between them. We experimentally demonstrate control of the Q factor from 2,250 to 2,750, by applying voltage from 0 to 11 V.
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U2 - 10.7567/JJAP.52.04CG01
DO - 10.7567/JJAP.52.04CG01
M3 - Article
AN - SCOPUS:84880836243
SN - 0021-4922
VL - 52
JO - Japanese journal of applied physics
JF - Japanese journal of applied physics
IS - 4 PART 2
M1 - 04CG01
ER -