Electron transport coefficients in O2 magnetron discharges

R. D. White; R. E. Robson; K. F. Ness; T. Makabe

doi:10.1088/0022-3727/38/7/006

Electron transport coefficients in O₂ magnetron discharges

R. D. White, R. E. Robson, K. F. Ness, T. Makabe

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Abstract

Electron transport coefficients required for the modelling of bulk electron transport in an O₂ magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The results represent the first multi-term solution of the non-conservative Boltzmann's equation for electric and magnetic fields at arbitrary orientations.

Original language	English
Pages (from-to)	997-1004
Number of pages	8
Journal	Journal of Physics D: Applied Physics
Volume	38
Issue number	7
DOIs	https://doi.org/10.1088/0022-3727/38/7/006
Publication status	Published - 2005 Apr 7

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Acoustics and Ultrasonics
Surfaces, Coatings and Films

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10.1088/0022-3727/38/7/006

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AU - Robson, R. E.

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AB - Electron transport coefficients required for the modelling of bulk electron transport in an O2 magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The results represent the first multi-term solution of the non-conservative Boltzmann's equation for electric and magnetic fields at arbitrary orientations.

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Electron transport coefficients in O₂ magnetron discharges

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