Electron transport coefficients in SiH₄ and Si₂H₆ in dc and rf fields

We have calculated data for electron transport in SiH₄ and Si₂H₆ which may serve as the basis for modelling physical and chemical processes in radio frequency (rf) plasmas. A direct numerical procedure was used to solve the Boltzmann equation and to obtain exact transport coefficients. It was shown that the cross section set that was adopted gives good agreement with the available experimental transport coefficients. Furthermore, we have calculated the features of the transport coefficients in rf fields. In both gases we observe good examples of anomalous longitudinal diffusion, time-dependent negative differential conductivity and complex temporal relaxation of momentum and energy. The behaviour of the transport coefficients may be correlated with the temporal development of the components of the velocity distribution function.